Specs. for Sapphire Substrates:
Orientation
Dia.
Thk.
TTV
Bow
Flatness
Ra.
C-axis[0001]
+
0.1
0
2"
330 to 430
+
25um
<15um
<20um
<5um
<0.5nm
Copyright by:
Nanjing Saifei
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2002.6
